System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as microcantilevers.
Inventors: Javier Tamayo, Mar Álvarez and Laura M. Lechuga
Priority Date: 2004
Proprietor: CSIC
Patent number: US20070962027. EP20040381004. WO2005EP02356
Licensed to: MecWins S.L.
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