Functionalisation and/or actuation method for probe sensors
Inventores: M. Calleja, A. Boisen, L. Gammelgaard, M. Nordstrom
Fecha de prioridad: 2000
Propietarios: Functionalisation and/or actuation method for probe sensors
System and method for surface inspection of micro- and nanomechanical structures
Inventores: J. Tamayo, J. Mertens, M. Calleja
Fecha de prioridad: 2000
Licenciada a: MecWins S.L.
|
|